KPL series
This abatement system uses atmospheric pressure plasma to treat PFC gas which is hardly decomposable
Uses direct current plasma to generate high temperature to decompose and treat PFC gas (SF6, CF4, etc.) that is difficult to decompose under usual conditions.
KPL-C13
Gases which are difficult to be decomposed, such as CF4, halogen gas, SiH4, TEOS, and by-product fluorine gas can be treated simultaneously in one system
- This abatement system can treat difficult-to-decompose CF4 & halogen gas, and only needs electricity & water.
- If fluorine-based gas generates as a by-product during decomposition, this abatement system can treat it with a built-in scrubber as well
KPL-C13-W
Metal-Etch abatement system for the treatment of gases which easily react with water but generate significant amounts of powder by-product (such as BCL3)
- This abatement system can treat difficult-to-decompose CF4 & halogen gas, and only needs electricity & water.
- If fluorine-based gas generates as a by-product during decomposition, this abatement system can treat it with a built-in scrubber as well