KT1000HBD

A hybrid abatement system uses a heater as an ignition source, and treats the waste gas with the combustion heat of fuel. 　　　　
Different from normal combustion system, a hybrid system does not use a pilot burner and the furnace has a heat storage structure, thus there is no risk of fire

• Compared with the traditional electrical heater type, this system is able to treat a large flow rate (600 slm) of waste gas generated by the Etch process with a small reactor.
• Hybrid abatement system burns fuel with electric heater, thus realizes a stable combustion abatement without the risk of misfire
• The amount of exhaust gas from the abatement system is less than the gas from combustion type, thus the influence of dust/byproduct and water vapor to the exhaust duct is less as well.
• Corrosion resistance of the whole abatement system is significantly improved by changing the water circulation method and applying a more corrosion-resistant inlet scrubber.