KT1000 series
High-efficiency abatement system using a heater as a heat source
It has a patented front & rear scrubber, and is most suitable for exhaust gas treatment in PE-CVD process, LP-CVD process, etc.
KT1000MFH
An M-type & F-type combined system which is equipped with an energy-saving mode, and it is compatible with high-load byproduct.
- Applicable to waste gas treatment high-load line such as 300mm semiconductor production line and LCD production line
- Standard components for energy saving mode to reduce water & electricity consumption, thus further reducing running costs
- Low need of maintenance space in front and at the back
KT1000MFS
An advanced version of KT1000MF, which is space-saving, low-cost & supports high-load gas processing.
- Applicable to waste gas treatment high-load line such as 300mm semiconductor production line and LCD production line
- Space-saving and low cost, easy to install
- Low need of maintenance space in front and at the back
KT1000EPS
This abatement system can safely process gas containing high concentration H2.
- Its electric heater can treat high-concentration H2 gas safely. This abatement system is for Epi process
- Make use of the self-burning energy from combustible gas. Thus heater power consumption is almost zero when treating combustible gas.
- Good at handling gas flow fluctuations without interrupting combustion. Preliminarily remove hydrolyzable and soluble gases at the inlet scrubber
- Gases which may react with moisture to produce solids can be processed without clogging, just like TCS and DCS
- By-product gas will be removed at the outlet scrubber
- With a standard fail-safe mechanism
KT1000MOC
This abatement system uses an electric-heater-type high-temperature furnace & thermal oxidative decomposition theory to treat high-flow-rate NH3, H2 gases, which are used in MO-CVD process.
- Use oxidative theory to treat organic metal compound (MO) gas, SiH4, etc.
- No fuel gas is used (such as fossil fuel). And, this is an innovative abatement system that is completely different from the existing system
- Since this abatement system makes use of the reaction heat energy generated by large-flow-rate NH3 and H2, the heater doesn't consume power during treatment. This is truly an energy-saving design.
- Fail-safe mechanism for safe treatment of high concentrations H2 & NH3
- The temperature sensor installed in the inlet pipe monitors inlet gas temperature all the time. This abatement systems has various safety mechanisms, such as a backfire-prevention safety mechanism which can run emergency dilution to the gas inside pipe when the inlet temperature increases