Products Culminative scrubber & thermal oxidation technology! The one and only gas abatement system in the industry. Electric heater type abatement system KT1000 series Electric heater type gas abatement system. This has patented scrubbers at front and back end. It is suitable for gas abatement for CVD process, etc.. Atmospheric plasma type abatement system KPL series Atmospheric plasma type gas abatement system. Due to stable direct current plasma high temperature, persistent PFC gas like SF6 and CF4, etc can be decomposed and purified. High efficiency small scrubber type abatement system KW series High efficiency small scrubber type gas abatement system. Equipped with two units of scrubbers, can handle water-soluble and hydrolysable gas efficiently. Absorption dry type abatement system KD series Absorption dry-type gas abatement system. This safely handles AsH3 and so on which needs hermetically-sealed treatment. Catalytic ozone type abatement system KC100 Catalytic ozone type abatement system which handles vent gas of O3. Due to internal catalyst, it can handle and decompose O3 compounds efficiently. Small VOC deodorizer system Small VOC deodorizer system using an electric heater and catalyst. It can save space, is easy to install and has low running costs. Direct combustion deodorizer Directly handles gas with the combustion method. It has an efficient and compact design. Catalytic combustion deodorizer Handles gas with low-temperature combustion method using a catalyst. Due to a highly efficient and longer lasting catalyst, this saves energy. Organic solvent collection system Suitable for collection of CFC and C2HCI3, etc.. Scrubber system Handles dust exhaust gas efficiently. It is possible to handle high temperature gas and corrosive gas simultaneously. Rotally dehumidifier system Uses a honeycomb silica-gel rotary without using LiCI. VOC concentrated deodorizer system Honeycomb rotary type Improved mechanical intensity of Low-K film,etc... UV anneal equipment for semiconductor processes. UV anneal This machine combines UV with heater treatment.

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