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Product▼Abatement System/KT1000Series
KT1000Series
High efficient abatement system using heater as energy
This has patented scrubbers at front and back end. It is suitable for gas abatement for CVD process, etc.
FEATURES
Due to front and back scrubber, handles gas efficiently
Water-soluble, hydrolysable gas and power dust are handled by front and back scrubber.
Efficient decomposition of dangerous and toxic gas by thermal oxidation
We use electric heaters for thermal oxidizing decomposition. It is safe and secure.
Safe and compact design
This series is safely designed for malfunction and safety warnings. It has a compact design for the front and back scrubbers, reactor and other necessary functions.
Low running cost
Uses only electricity and water, therefore it is easy to manage, making it possible to reduce running cost dramatically.
Environmental friendly
Does not use fossil fuel, therefore there is no CO2 emission and thermal energy waste. It is an environmentaly friedly machine.
Install anywhere, including a clean room
OUTLINES
KT1000FA and Fi
Suitable for handling deposition gas with a comparably low decomposition temperature.
KT series standard model
Auto purifying function is a standard feature
Easy maintenance
質咥隸譆 W950﹣D950﹣H1900(+100)mm
質咥隸譆 800L/min
質咥隸譆 650-900 degree(Max.950 degree)
質咥隸譆
SiH4 TEOS PH3 B2H6 etc.
and
NF3
KT1000HA
Suitable for handling deposition gas with a comparably low decomposition temperature.
PFC Abatement for CVD
Auto purifying function is a standard feature
Easy maintenance
質咥隸譆 W1050﹣D1100﹣H1950 mm
質咥隸譆 200L/min
質咥隸譆 800℅1200∵
質咥隸譆
SiH4 SiH2CI2 WF6 NH3 etc.
and
PH3 SiCI4 TEOS etc.
KT1000EP
Can safely handle gas including high concentrated H2.
The electric heater safely handles highly concentrated H2 gas.
Due to original water usage structure, it greatly enhances safety.
質咥隸譆 W“1200﹣D“1200﹣H“1950(mm)
質咥隸譆 850L/min﹋Include air for burning purpose. Max flow for HS is 150L/min)
質咥隸譆 700℅900 degree
質咥隸譆
H2 base of SiH4 SiH2Cl2 and HCl etc.
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