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ProductAbatement SystemKPL Series
KPL series
Abatement system for persistent PFC gas using atmospheric plasma
Due to a stable high temperature from the direct current plasma, it can decompose and purify persistent PFC gas like SF6 and CF4, etc..
FEATURES
No unnecessary fossil fuels
No unnecessary initial cost of construction of fossil fuel pipe and running cost of fossil fuel.
Using direct current atmospheric plasma
Security from accidental fires due to stable discharges and protected electricity.
Simple structure of reactor
Due to simple structure of reactor tank plasma generating portion, it realizes easy-maintenance and low-cost.
Decomposes simultaneously
It is possible to handle PFC gas like CF4 and SF6 and halogen like HBr simultaneously.
OUTLINES
KPL-W
Dimensin W800D850H2000(mm)
Max flow rate Min.40-Max.200litter/min(including N2)
Heater temperature 6001200
Gas to be treated
CF4 SF6 HBr TEOS DCS WF6 etc.
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